Interactive Lithography Simulator

Illumination

Image

Projection

Numerical Aperture

Wavelength (nm)

Focus(nm)0

Astig-0/900

Astig-450

Coma-X0

Coma-Y0

Spherical0

Mask dimensions

Width (μm)

Exposure Parameters

Contrast1.00

Exposure4.00

Compute Details

Pupil Radius Samples

30

Keyboard Shortcuts

Delete :d

Center :c

Clone :C

Size + 5 %:+

Size - 5 %:-

Size / 2 :h

Rotate 90 :r

Move Rel :Arrow Key

Step Ratio :1,..,9

Undo :Ctrl - Z

Mouse Actions

Left - Click / Grab Corner :Drag / Move to rotateLeft - Click / Grab Edge :Drag / Move to resizeLeft - Click / Grab Center :Drag / Move entire objectRight - Click :Popup Menu to select objectSelect Object :Hover over the object

Demo Video

Video 1YouTubeVideo 2YouTube