Litho Simulator
Illumination
Mask
Projection
Numerical Aperture
Wavelength (nm)
Power
0.00
Astig-0/90
0.00
Astig-45
0.00
Coma-X
0.00
Coma-Y
0.00
Spherical
0.00
Reset Aberrations
Mask dimensions
Width (μm)
Compute Details
Pupil Radius Samples
49
Keyboard Shortcuts
Delete :
d
Increase size :
+
Decrease size :
-
Rotate 90 :
r
Divide size or pitch by 2
h
Mouse Actions
Left - Click / Grab Corner :
Drag / Move to rotate
Left - Click / Grab Edge :
Drag / Move to resize
Left - Click / Grab Center :
Drag / Move entire object
Right - Click :
Popup Menu to select object
Select Object :
Hover over the object