Interactive Lithography Simulator

Illumination

Image

Projection

Numerical Aperture

Wavelength (nm)

Power0.00

Astig-0/900.00

Astig-450.00

Coma-X0.00

Coma-Y0.00

Spherical0.00

Mask dimensions

Width (μm)

Exposure Parameters

Contrast1.00

Exposure4.00

Compute Details

Pupil Radius Samples

30

Keyboard Shortcuts

Delete :d

Center :c

Increase size :+

Decrease size :-

Rotate 90 :r

Divide size by 2h

Clone :C

Mouse Actions

Left - Click / Grab Corner :Drag / Move to rotateLeft - Click / Grab Edge :Drag / Move to resizeLeft - Click / Grab Center :Drag / Move entire objectRight - Click :Popup Menu to select objectSelect Object :Hover over the object

Demo Video

Video 1YouTubeVideo 2YouTube