The interactive lithography app is a tool for exploring the basic principles of partial coherence. The application requires a GPU equivalent of Nvidia RTX 3060, but does otherwise not depend on Nvidia interfaces like CUDA.

The Litho App is a WebGPU application where we explore GPU computing. Again, remember the this application will push your graphics card, even best ones. It may work on a CPU with integrated graphics but it will be slow. The app allows the user to interactively modify illumination and mask objects. Move them around, rotate and scale them.

But the price for this interactivity is that each tiny change results in hundreds of 1024×1024 fast Fourier transforms being computed. It will not feel interactive without a recent GPU.

Instruction how to use the application will be found in the rightmost column.

One technicality to mention, in an image simulation such as this, numerical aperture, the size of the virtual mask, and wavelength define the (sampled) pupil size. To keep the application resonably interactive and useful to a wider audience, the pupil size is limited to 255 x 255 samples. This results in that the application will not accept any combination of those three parameters. Still, any combination can be simulated (within those limits), but it cannot be added in any order.

For example, when changing the wavelength (significantly) down, adjust the size of the mask first.

Enjoy – and as always, feedback is always appreciated.