Interaktive Litho

The interactive lithography app is a tool for exploring the basic principles of partial coherence. The application requires a GPU equivalent of Nvidia RTX 3060, but does not otherwise depend on Nvidia interfaces like CUDA.

The Litho App is a WebGPU application where we explore portable GPU computing. Again, remember this application will push your graphics card, even the best ones. It may work on a CPU with integrated graphics, but it will be slow. The app allows the user to interactively modify illumination and mask objects. Move them around, rotate and scale them.

Aber der Preis für diese Interaktivität ist, dass jede kleinste Änderung Hunderte von 1024 × 1024 Fast-Fourier-Transformationen zur Folge hat. Ohne eine aktuelle GPU wird es sich nicht interaktiv anfühlen.

Instructions on how to use the application will be found in the rightmost column. The user interface also provides a link to an instructional video.

One technicality to mention, in an image simulation such as this, numerical aperture, the size of the virtual mask, and wavelength define the (sampled) pupil size. To keep the application reasonably interactive and useful to a wider audience, the pupil size is limited to 255 x 255 samples. This results in that the application not accepting just any combination of those three parameters. Still, any combination can be simulated (within those limits); it just cannot be added in any order.

Zum Beispiel, wenn Sie die Wellenlänge (erheblich) nach unten ändern, passen Sie zuerst die Größe der Maske an.

Viel Spaß – und wie immer, Rückmeldung wird geschätzt.